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HomeEQUIPMENTEQUIPMENT LISTPHOTOLITHOGRAPHY

EQUIPMENT LIST

PHOTOLITHOGRAPHY

Suss RC8 Spinner
Primus STT 15 Spinner
Suss MA8 Mask Aligner
Terra Universal Wet Bench
Semitool PSC-101 Spin Rinse Dryer

Last updated: 9.1.2013

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EQUIPMENT

CHARACTERIZATION
LASERS
PHOTOLITHOGRAPHY
FABRICATION OF PHOTOLITHOGRAPHY MASKS
THIN FILM FABRICATION
PACKAGING METHODS
TESTING OF MICROELECTRONIC CIRCUITS
FOCUSED ION BEAM (FIB)
ETCHING
OTHER

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Center of Microscopy

and Nanotechnology

Erkki Koiso-Kanttilan katu 3
Tietotalo 1, Entrance E
Linnanmaa
90570 Oulu