Equipment

The equipment of the CMNT can be roughly divided for fabrication and characterization devices. Fabrication devices enable preparation of different kinds of micro- and nanostructures and materials research. Available fabrication processes include for example complete photolithography process with photolithography mask fabrication.

Characterization devices enable the analysis and measurement of optical and structural properties of micro- and nanostructures and materials. Besides technology related research, most of the characterization equipment can be used in other fields of research like in biomedical sciences. CMNT equipment include for example several scanning electron microscopes (SEM), transmission electron microscope (TEM), electron probe microanalyzer (EPMA), x-ray diffractometer (XRD), and x-ray fluorescence spectrometer (XRF) for imaging, characterization of microstructure, and elemental analysis of various samples. The center has also equipment for sample preparation for all the analysis devices.

In the same building with the CMNT are located Microelectronics and Materials Physics laboratories which have a versatile selection of research equipment related to material research, like scanning probe microscope (SPM) Veeco Nanoscope IV. For the questions related to the use of these devices, contact the personnel of the laboratory.

The CMNT has also a wide selection of design and simulation softwares, for example AutoCad and multiphysics simulation software COMSOL.

8.1.2013

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