Field emission scanning electron microscope (FESEM) enables high resolution electron imaging with low acceleration voltages which makes it possible to analyze also delicate biological samples and nanostructures.
For chemical and structural analysis microscope is equipped with EDS (Energy-Dispersive X-ray Spectroscopy) analyzer and EBSD (Electro Backscatter Diffraction) camera. EBSD gives information from the crystal structure and texture by measuring the diffraction of the electrons from the sample. Versatile software for the analysis of EBSD data is available. By combining the chemical and crystal structure information, accurate phase maps can be obtained.
- Acceleration voltage: 0.1-30 kV
- Resolution: 1.3 nm/20 kV, 1.5 nm/15 kV, 2.8 nm/1 kV
- Detectors: two SE, one BSE
- EDS detector (EDAX, Apollo X)
- Elemental analysis from carbon to uranium
- EBSD camera (EDAX, Hikari XP) and analysis software for crystal structure analysis
Last updated: 28.2.2014